介紹了壓阻式傳感器的靈敏度溫度補償原理,給出了一種在寬溫度范圍內采用了分段補償方式進行靈敏度溫度補償的方法,實現了寬溫度范圍內較高的補償準確度。這里介紹的方案是通過數- 模組合硬件電路實現分段補償,具體方案是基于目前國內外OEM 硅壓力傳感器廠商采用的固定電阻器并聯補償法。技術途徑是設計一組溫控開關電路來控制并聯電阻器是否接入,溫度信號來源于恒流源供電下的傳感器橋壓信號。此方法硬件電路及補償計算均較簡單,適用于較寬的溫度環境,性能價格比合理。同時便于擴展為多段補償以實現高補償準確度,并且傳感器在快速溫變環境下工作時溫度跟蹤誤差小。
關鍵詞: 分段補償; 并聯電阻; 有源硬件電路
Abstract : The principle of the temperature compensation to a piezo2resistive transducer’s sensitivity is intro2 duced.By using subsection compensation in wide temperature range ,a method of sensitivity temperature compen2? sation was put forward. A relatively precise compensation in wide temperature range is fulfilled. The scheme whose subsection compensation is realized by D/ A assembled hardware circuit is introduced. Detailed project is
based on the method of fixed resistance’s parallel compensation which is adopted by manufacturers of OEM sili2 con pressure sensor at home and abroad. The approach is designed a group of temperature controlled switch circuit which control whether the parallel resistance is activated or not . Temperature signal is come from bridge voltage signal which is power supply by constant current source. It is sample in both hardware circuit and compensating calculation ,which is applied at a relatively wide temperature circumstance and high performance at low price. At the same time it is easy to extend to more section compensation ,which can achieve the high precision of compen2 sation ,moreover sensor’s slot error is lower which work in the rapid temperature change circumstance.
Key words : subsection compensation ; parallel resistance ; active hardware circuit